Quantum Design
진공 호환 장치
Vacuum Devices
가격 (VAT별도)
가격 문의
이송 범위 25mm ~ 600mm
제품군 High Vacuum / Low Vacuum
컨트롤러 Integrated controller
분해능 Fine resolution
진공 챔버모션 컨트롤반도체표면 분석자동화 실험
주문 후 2~5일 이내 배송 (재고 보유 상품에 한함)
정품 인증 제품
01
상품 설명
Vacuum Devices는 진공 환경에서 정밀한 위치 제어가 필요한 실험 및 연구 장비를 위한 전동 리니어 스테이지입니다. High Vacuum Devices와 Low Vacuum Devices 두 가지 제품군으로 구성되어 있으며, 75mm부터 600mm까지 다양한 이송 거리를 제공합니다. 모든 모델은 통합 컨트롤러와 정밀 제어 기능을 내장하고 있어 진공 챔버 내부에서도 안정적인 모션 컨트롤이 가능합니다. X-LRQ 시리즈는 고진공 환경용 장거리 스테이지이며, X-LSM 시리즈는 소형 고정밀 응용 분야에 적합합니다. 반도체, 표면 분석, 재료 과학 등 진공 환경 실험 자동화에 필수적인 장비입니다.
02
핵심 특징
진공 호환
고진공 및 저진공 환경에서 안정적 작동
다양한 행정
75mm~600mm 이송 거리 옵션 제공
통합 제어
내장 컨트롤러로 즉시 사용 가능
정밀 분해능
Fine resolution 위치 제어 지원
저속 안정성
Low speed 모드로 정밀 위치 결정
03
기술 사양
- 이송 범위
- 25mm ~ 600mm
- 제품군
- High Vacuum / Low Vacuum
- 컨트롤러
- Integrated controller
- 분해능
- Fine resolution
- 속도 모드
- Low speed
04
상세 규격표
| 카탈로그넘버 | Model | Description |
|---|---|---|
| DAU-MMOTIVAD-P001E1 | X-LRQ075AL-SV2-KX14P | High vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P002E1 | X-LRQ150AL-SV2-KX14P | High vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P003E1 | X-LRQ300AL-SV2-KX14P | High vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P004E1 | X-LRQ450AL-SV2-KX14P | High vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P005E1 | X-LRQ600AL-SV2-KX14P | High vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P006E1 | X-LSM025A-SV2-KX14P | High vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P007E1 | X-LSM050A-SV2-KX14P | High vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P008E1 | X-LSM100A-SV2-KX14P | High vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P009E1 | X-LSM150A-SV2-KX14P | High vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P010E1 | X-LSM200A-SV2-KX14P | High vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P011E1 | T-NA08A25-SV2-KT03X06P | High vacuum linear actuator, 25 mm travel, RS-232 |
| DAU-MMOTIVAD-P012E1 | T-NA08A50-SV2-KT03X06P | High vacuum linear actuator, 50 mm travel, RS-232 |
| Specification |  |
 |
.jpg) |
|---|---|---|---|
| Value | Value | Value | |
| Model | X-LRQ-SV2 Series | X-LSM-SV2 Series | T-NA-SV2 Series |
| Feature | High vacuum motorized linear stages with built-in controllers | High vacuum miniature motorized linear stages with built-in controllers | High vacuum micro linear actuators with built-in controllers |
| Built-in Controller | Yes | Yes | Yes |
| Repeatability | < 2.5 µm | <1 ~4 um | < 1 µm |
| Communication Interface | RS-232 | RS-232 | RS-232 |
| Communication Protocol | Zaber ASCII (Default), Zaber Binary | Zaber ASCII (Default), Zaber Binary | Zaber Binary |
| Maximum Centered Load | 1000 N | 100 N | 46 N |
| Maximum Cantilever Load | 3000 N-cm | 300 N-cm | |
| Guide Type | Recirculating Ball Linear Guide | Needle roller bearing | |
| Maximum Current Draw | 1200 mA | 350 mA | 350 mA |
| Power Supply | 24-48 VDC | 24-48 VDC | 12-16 VDC |
| Power Plug | None, use X-PIB | None, use X-PIB | None, use T-DSUB9-P |
| Motor Steps Per Rev | 200 | 200 | 200 |
| Data Cable Connection | Teflon flying leads with M8 4 pin M/F | Teflon flying leads with M8 4 pin M/F | Teflon flying leads with Minidin 6 pin M/F |
| Mechanical Drive System | Precision lead screw | Precision lead screw | Precision lead screw |
| Limit or Home Sensing | Magnetic home sensor | Magnetic hall sensor | Magnetic hall sensor |
| Manual Control | No | No | No |
| Axes of Motion | 1 | 1 | 1 |
| LED Indicators | Yes | Yes | Yes, Bi-colour |
| Mounting Interface | M6 and M3 threaded holes | M3 and M6 threaded holes and M4 threaded center hole | 3/8-32 nut, 3/8" shank, or M3 screws |
| Vacuum Compatible | High vacuum (10-6 Torr) | High vacuum (10-6 Torr) | High vacuum (10-6 Torr) |
| Operating Temperature Range | 0 to 50 degrees C | 0 to 50 degrees C | 0 to 50 degrees C |
| RoHS Compliant | Yes | Yes | Yes |
| CE Compliant | Yes | Yes | Yes |
| Tranvel Range | 75 ~ 600 mm | 25.4 ~ 203.2 mm | 25.4 or 50.8 mm |
| Accuracy | 15 ~ 150 um | 8 ~ 61 um | 15 or 30 um |
| Maximum Speed | 35 ~ 205 mm/s | 24 ~ 100 mm/s | 8 mm/s |
| Peak Thrust | 60 ~100 N | 15 ~35 N | 46 N |
| 카탈로그넘버 | Model | Description |
|---|---|---|
| DAU-MMOTIVAD-P013E1 | X-LRQ075AL-SV1-KX14P | Low vacuum, motorized linear stage, 75 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P014E1 | X-LRQ150AL-SV1-KX14P | Low vacuum, motorized linear stage, 150 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P015E1 | X-LRQ300AL-SV1-KX14P | Low vacuum, motorized linear stage, 300 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P016E1 | X-LRQ450AL-SV1-KX14P | Low vacuum, motorized linear stage, 450 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P017E1 | X-LRQ600AL-SV1-KX14P | Low vacuum, motorized linear stage, 600 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P018E1 | X-LSM025A-SV1-KX14P | Low vacuum, motorized Linear Stage, 25 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P019E1 | X-LSM050A-SV1-KX14P | Low vacuum, motorized Linear Stage, 50 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P020E1 | X-LSM100A-SV1-KX14P | Low vacuum, motorized Linear Stage, 100 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P021E1 | X-LSM150A-SV1-KX14P | Low vacuum, motorized Linear Stage, 150 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P022E1 | X-LSM200A-SV1-KX14P | Low vacuum, motorized Linear Stage, 200 mm travel, integrated controller, fine resolution, low speed |
| DAU-MMOTIVAD-P023E1 | T-NA08A25-SV1-KT03X06P | Low vacuum linear actuator, 25 mm travel, RS-232 |
| DAU-MMOTIVAD-P024E1 | T-NA08A50-SV1-KT03X06P | Low vacuum linear actuator, 50 mm travel, RS-232 |
| Specification | .jpg) |
.jpg) |
.jpg) |
|---|---|---|---|
| Value | Value | Value | |
| Model | X-LRQ-SV1 Series | X-LSM-SV1 Series | T-NA-SV1 Series |
| Feature | High vacuum motorized linear stages with built-in controllers | High vacuum miniature motorized linear stages with built-in controllers | High vacuum micro linear actuators with built-in controllers |
| Built-in Controller | Yes | Yes | Yes |
| Repeatability | < 2.5 µm | <1 ~4 um | < 1 µm |
| Communication Interface | RS-232 | RS-232 | RS-232 |
| Communication Protocol | Zaber ASCII (Default), Zaber Binary | Zaber ASCII (Default), Zaber Binary | Zaber Binary |
| Maximum Centered Load | 1000 N | 100 N | 46 N |
| Maximum Cantilever Load | 3000 N-cm | 300 N-cm | |
| Guide Type | Recirculating Ball Linear Guide | Needle roller bearing | |
| Maximum Current Draw | 1200 mA | 350 mA | 350 mA |
| Power Supply | 24-48 VDC | 24-48 VDC | 12-16 VDC |
| Power Plug | None, use X-PIB | None, use X-PIB | None, use T-DSUB9-P |
| Motor Steps Per Rev | 200 | 200 | 200 |
| Data Cable Connection | Teflon flying leads with M8 4 pin M/F | Teflon flying leads with M8 4 pin M/F | Teflon flying leads with Minidin 6 pin M/F |
| Mechanical Drive System | Precision lead screw | Precision lead screw | Precision lead screw |
| Limit or Home Sensing | Magnetic home sensor | Magnetic hall sensor | Magnetic hall sensor |
| Manual Control | No | No | No |
| Axes of Motion | 1 | 1 | 1 |
| LED Indicators | Yes | Yes | Yes, Bi-colour |
| Mounting Interface | M6 and M3 threaded holes | M3 and M6 threaded holes and M4 threaded center hole | 3/8-32 nut, 3/8" shank, or M3 screws |
| Vacuum Compatible | High vacuum (10-3 Torr) | High vacuum (10-3 Torr) | High vacuum (10-3 Torr) |
| Operating Temperature Range | 0 to 50 degrees C | 0 to 50 degrees C | 0 to 50 degrees C |
| RoHS Compliant | Yes | Yes | Yes |
| CE Compliant | Yes | Yes | Yes |
| Tranvel Range | 75 ~ 600 mm | 25.4 ~ 203.2 mm | 25.4 or 50.8 mm |
| Accuracy | 15 ~ 150 um | 8 ~ 61 um | 15 or 30 um |
| Maximum Speed | 35 ~ 205 mm/s | 24 ~ 100 mm/s | 8 mm/s |
| Peak Thrust | 60 ~100 N | 15 ~35 N | 46 N |
05
주문 옵션
24개| 카탈로그넘버 | 모델 | 설명 | 단위 | 단가(VAT별도) | 재고 | 수량 | 주문 |
|---|---|---|---|---|---|---|---|
| X-LRQ075AL-SV2-KX14P | High vacuum 75 mm travel controller | 1/EA | 문의 | 7 Day | 1 | ||
| X-LRQ150AL-SV2-KX14P | High vacuum 150 mm travel controller | 1/EA | 문의 | 7 Day | 1 | ||
| X-LRQ300AL-SV2-KX14P | High vacuum 300 mm travel controller | 1/EA | 문의 | 7 Day | 1 | ||
| X-LRQ450AL-SV2-KX14P | High vacuum 450 mm travel controller | 1/EA | 문의 | 7 Day | 1 | ||
| X-LRQ600AL-SV2-KX14P | High vacuum 600 mm travel controller | 1/EA | 문의 | 7 Day | 1 |
06
자주 묻는 질문
07
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